NISHIDA Satoshi
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Title | Associate Professor |
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Department | Department of Mechanical Engineering |
Course | Mechanical Engineering Course |
Our research interst is depodition and investgation of silicon thin films on glass or silicon substrate.Our recent research topics are following;
We think both simulational and experimental studies are important. We have vacuum chambers, Dry pump, TMP pump and RF/VHF power supply. CHEMKIN-Pro (Reaction Design) and ANSYS FLUENT (ANSYS) were utilized for analysis.
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Fig.1 Deposited silicon during Plasma Jet CVD process | Fig.2 Calculated velocity distribution in Plasma Jet CVD |
CVD, silicon thin film, solar cells
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