Associate Professor

MUTA Hiroshi

Title	Associate Professor
Department	Department of Mechanical Engineering
Course	Mechanical Engineering Course

Development of new plasma device for thin-film solar cell fabrication
The plasma device for thin-film solar cell fabrication is strongly required to fabricate high quality silicon films over large area with high deposition rate and low cost. We develop a new plasma device using unique electrodes with the balanced power feeding.
Development of new measuring system of plasma parameters in reactive plasmas
In order to perform plasma process reproducibly, plasma monitoring is important. We develop some new measuring systems which give spatial profiles of the plasma parameters with short time and adequate accuracy.
Optimization of beam process
We study efficient production methods of various beams such as ion beam and neutral beam using plasma technology. In addition, the application of accurately controlled beam to new material process is investigated.
Development of numerical simulations of processing plasmas
We develop plasma simulation codes including various gas flows which is useful for the understanding of experimental results and the design of experimental apparatus. This work is also suitable for the educational training of the dynamics, electromagnetics and computer programing.


Fig.1 Experimental setup	Fig.2 Example of a-Si:H film